JPH0290663U - - Google Patents
Info
- Publication number
- JPH0290663U JPH0290663U JP16903488U JP16903488U JPH0290663U JP H0290663 U JPH0290663 U JP H0290663U JP 16903488 U JP16903488 U JP 16903488U JP 16903488 U JP16903488 U JP 16903488U JP H0290663 U JPH0290663 U JP H0290663U
- Authority
- JP
- Japan
- Prior art keywords
- ionization
- vacuum container
- heater
- gas
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007733 ion plating Methods 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 5
- 239000012495 reaction gas Substances 0.000 claims 2
- 239000007795 chemical reaction product Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 239000000376 reactant Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16903488U JPH0290663U (en]) | 1988-12-27 | 1988-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16903488U JPH0290663U (en]) | 1988-12-27 | 1988-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0290663U true JPH0290663U (en]) | 1990-07-18 |
Family
ID=31458739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16903488U Pending JPH0290663U (en]) | 1988-12-27 | 1988-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0290663U (en]) |
-
1988
- 1988-12-27 JP JP16903488U patent/JPH0290663U/ja active Pending
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